Industries
Semiconductor CNC Machining
Vacuum-chamber parts, precision stages and fixtures with controlled surface finishes and cleanliness handling.
What we machine
Chamber, stage and wafer-handling components
Semiconductor equipment demands flat, clean, particle-free parts. We machine chamber components, wafer-handling hardware and fixtures from aluminium and stainless, then control finish, edge quality and packing to suit the tool build.
- Vacuum-chamber bodies and lids
- Wafer-handling arms and end-effectors
- Precision stages, plates and fixtures
- Heat sinks and cooling manifolds
Materials & finishes
6061 and 5083 aluminium, 316L stainless, copper and engineering ceramics by customer supply. Clean anodising and nickel plating available.
Process & tolerance
5-axis milling and precision turning; flatness 0.01 mm, ±0.005 mm on interfaces, Ra 0.2 μm and controlled edge break.
Quality documentation
Cleanliness-aware handling, first-article inspection, CMM reports, material certificates and vacuum-compatible packing options.
Related services
Why GreatLight
Built for semiconductor programs
Flatness and finish
Large plates and chamber faces are machined and verified for flatness and surface quality.
Particle-conscious processing
Deburring, cleaning and packing are planned around the contamination budget.
Prototype to tool build
One-off chamber parts and repeat fixtures run on the same quality system.
Have a semiconductor part to machine?
Upload drawings or CAD files and our engineering team will reply with price, lead time and DFM feedback within 12 hours.